TīmeklisThe Lam 9600 is intended to etch aluminum metal and TiW layers with highly vertical sidewalls suitable for 0.35 um line width. The plasma is a medium-high density … TīmeklisFeatures Low Pressure Operation High Density Plasma Independent Control of Ion Density and Ion Energy Patented Planar Coil Simple Efficient Design Rainbow …
For Sale: LAM Research TCP 9600 PTX Used - Photonic …
http://photonicmicrodevices.com/LAM_Research_9600.html Tīmeklis2006. gada 19. okt. · The manufacture of semiconductors is introduced as an example of the monitoring of batch processes. Although there are many steps in this process, this study focuses specifically on an aluminium stack etch process that is performed on the commercially available Lam 9600 plasma etch tool (Wise et al., 1999). genshin download page
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Tīmeklis2024. gada 14. apr. · 离子束刻蚀机ibe(b203) 编号: ibe-a-150(1小时起约) 工艺类别: 刻蚀 所属单位: 加工平台 管理员: 马苏州 状态: 停用 价格: 200/30分钟 单位预约时间: 30 (单位:分钟) TīmeklisDownload LAM Research TCP 9600 PTX Configurations. Click Photos to Enlarge. Lam Research features the following: 2 chambers one of which is for Al etching and. the … TīmeklisLAM 9600 WITH ENDPOINT DETECTION FROM LAM MANUFACTURER: LAM RESEARCH Model: 9600 Description: The Lam 9600 is intended to etch aluminum metal and TiW layers with highly vertical sidewalls suitable for 0.35 um line width. The plasma is a medium-high density transformer coupled plasma, similar to ICP … chris angel simpsons